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【国际标准】 Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
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标准简介适用范围：
暂无
标准号：
IEC 62047-21:2014 EN-FR
标准名称：
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
英文名称：
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials标准状态：
现行-
发布日期：
2014-06-19 -
实施日期：
出版语种：
EN-FR
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- 下一篇： IEC 62047-22:2014 EN-FR 8b4671b0 Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates
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