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【国际标准】 Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
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标准简介适用范围：
暂无
标准号：
ISO 14644-14:2016 EN
标准名称：
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration
英文名称：
Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration标准状态：
现行-
发布日期：
2016-09-14 -
实施日期：
出版语种：
EN
- 其它标准
- 上一篇： ISO 14644-13:2017 EN 23fd3eec Cleanrooms and associated controlled environments — Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
- 下一篇： ISO 14644-15:2017 EN 111743a6 Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
- 推荐标准
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- ISO 14644-15:2017 EN 111743a6 Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
- ISO 14644-16:2019 EN fb22fbde Cleanrooms and associated controlled environments — Part 16: Energy efficiency in cleanrooms and separative devices
- ISO 14644-17:2021 EN 438098d9 Cleanrooms and associated controlled environments — Part 17: Particle deposition rate applications
- ISO 14644-1:2015 EN b423fa95 Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration
- ISO 14644-2:2015 EN 88b59d1b Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
