【国外标准】 Standard Test Method for Combined Fine and Gross Leaks for Large Hybrid Microcircuit Packages (Withdrawn 2009)

This test method provides an evaluation of the quality of an in-line sealing process on a real time basis for sealed packages. It eliminates the need to expose the specimen to long exposures of high pressure to drive the helium gas into the package to later be detected by the same method herein used. Previously, separate test methods were required to detect large or small leaks. This method provides only one test to accomplish all test levels without potential for specimens with leaks to escape detection within the range of detection being employed (see Practices F 98).Both development and research, along with manufacturing control, may be served by using this test method. Current gross leak test methods and fine leak test methods may be combined into one using this method. No exposure to high pressure processing hazards is involved and safety of operation in production environment is enhanced.1.1 This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.